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“To achieve this goal, the new SOLA xT platform features on-board UV monitoring and advanced algorithms to maintain stable wafer-to-wafer performance.”
“Jan. 13/PRNewswire-FirstCall/-- Novellus Systems (Nasdaq: NVLS) today introduced its next-generation ultra-violet thermal processing (UVTP) system, the SOLA xT.”
“The independent control of temperature, UV wavelength, and UV intensity enable SOLA xT to extend to future technology generations, where new materials are likely to be introduced.”
“The new SOLA xT is designed to meet the market needs for a robust UVTP system suitable for high volume manufacturing at 32 nm," said Kevin Jennings, senior vice president of the PECVD business unit at Novellus Systems.”
“The first SOLA xT system will be shipped to UMC's Fab 12i in Singapore.”
“Novellus and SOLA are registered trademarks, and SOLA xT is a trademark of Novellus Systems, Inc. SOURCE Novellus Systems, Inc.”
“The SOLA xT is used in the manufacturing of advanced logic devices at 45nm and below and incorporates a proprietary UVTP treatment process that modifies the physical characteristics of a previously-deposited film through exposure to ultraviolet light and heat.”
“T xT exileddelusion made me decide to post it anyways.”
“An output sample of the shape function for node 13 evaluated at point xT = {0.2,0.4} using the subroutine RPIM_ShapeFunc_2D and”
“Rifloirejuflifiée conire les Romans, par M.i. siiai.xT dm FRfSNoY. å Amfterd.”
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