Definitions

from Wiktionary, Creative Commons Attribution/Share-Alike License

  • Front Opening Unified Pod

Etymologies

Sorry, no etymologies found.

Examples

  • The ceiling is lined with a complex system of tracks, along which scoot transport cars -- some empty, and some containing the amber canisters known as a "FOUP" (shorthand for "Front Opening Unified Pod").

    PCWorld

  • The plant machinery usually removes wafers from the FOUP in batches of five, processes them in manufacturing one at a time, and returns them to the FOUP for the next stage of processing.

    PCWorld

  • In this image, we see a FOUP waiting in the foreground as wafers go through a process; in the background, a second FOUP is being lifted up to the transport vehicle.

    PCWorld

  • Here we see a mechanized apparatus securing itself to a FOUP so that it can carry the FOUP up to a waiting transport vehicle.

    PCWorld

  • Inside the photolithography area, wafers transported via a FOUP pass through a photoresistant coating operation, then receive patterning, and finally undergo a development cycle in which equipment transfers the pattern to the wafer surface.

    PCWorld

  • In addition to 3D vibration sensing and FOUP-based, contact-less reader/recharger station, the SMW2 features advanced analytical tools that facilitate troubleshooting, SPC-based trend identification and tool-to-tool comparison.

    undefined

  • The new system, coined SMW2, consists of a 300mm wafer instrumented with sensitive three dimensional vibration sensors, and a "Smart FOUP (TM)" that serves as a recharge and communication station, as well as a clean storage container.

    undefined

  • Solution: The new product provides customers with the capability of monitoring the process tools mechanical health, using the new "Smart FOUP" which interfaces with the process tools like any standard FOUP.

    Fabtech - News

  • In the new product. the docking station is integrated into a dedicated FOUP.

    Fabtech - News

  • This operation requires a special tool for opening the FOUP.

    Fabtech - News

Comments

Log in or sign up to get involved in the conversation. It's quick and easy.