FOUP

The ceiling is lined with a complex system of tracks, along which scoot transport cars -- some empty, and some containing the amber canisters known as a "FOUP" (shorthand for "Front Opening Unified Pod").

PCWorld 2010

The plant machinery usually removes wafers from the FOUP in batches of five, processes them in manufacturing one at a time, and returns them to the FOUP for the next stage of processing.

PCWorld 2010

Here we see a mechanized apparatus securing itself to a FOUP so that it can carry the FOUP up to a waiting transport vehicle.

PCWorld 2010

Inside the photolithography area, wafers transported via a FOUP pass through a photoresistant coating operation, then receive patterning, and finally undergo a development cycle in which equipment transfers the pattern to the wafer surface.

PCWorld 2010

In this image, we see a FOUP waiting in the foreground as wafers go through a process; in the background, a second FOUP is being lifted up to the transport vehicle.

PCWorld 2010

Solution: The new product provides customers with the capability of monitoring the process tools mechanical health, using the new "Smart FOUP" which interfaces with the process tools like any standard FOUP.

Fabtech - News 2009

In the new product. the docking station is integrated into a dedicated FOUP.

Fabtech - News 2009

This operation requires a special tool for opening the FOUP.

Fabtech - News 2009

In addition to 3D vibration sensing and FOUP-based, contact-less reader/recharger station, the SMW2 features advanced analytical tools that facilitate troubleshooting, SPC-based trend identification and tool-to-tool comparison.

unknown title 2009

The new system, coined SMW2, consists of a 300mm wafer instrumented with sensitive three dimensional vibration sensors, and a "Smart FOUP (TM)" that serves as a recharge and communication station, as well as a clean storage container.

unknown title 2009