from Wiktionary, Creative Commons Attribution/Share-Alike License

  • abbr. Tetrakis-Dimethylamino-Germane, the metalorganic source for Germanium Nitride (GeN) in MOCVD of semiconductors. It grows GeN instead of Ge, and is used at either high temperatures (600-800 C) or with plasma because of its very low vapor pressure and higher decomposition temperature. Also known as TDMAGe and pronounced as T-Damage.


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