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Examples
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The Vistec EBPG5200 is the latest version of the highly successive and field-proven EBPG electron-beam lithography tool series.
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With the Vistec EBPG5200 series and its unique and flexible nanoscale patterning capabilities, the INL has acquired one of the most advanced electron-beam lithography systems for nanotechnology research and development.
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The successful detection of colorization problems became possible by using an automated macro defect inspection system (Vistec LDS3200) with a combined microscope module and special optimized analysis software. optical system is optimized (Fig. 6) to get one complete sensor pad into the field of view.
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With the Vistec EBPG5200 series and its unique and flexible nanoscale patterning capabilities, the INL has acquired one of the most advanced electron-beam lithography systems for nanotechnology research and development.
Nano Tech Wire 2010
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Vistec EBPG5200 is set to generate structures to less than 8nm on varying substrates sizes from piece parts of a few millimetres to full patterning across a 200mm diameter.
Nano Tech Wire 2010
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The core of that project is the Vistec EBPG5000pES electron-beam lithography system, which will enable the College of Optoelectronic Science and Engineering to enhance their research and education effectiveness for both their students and associated research partners.
Nano Tech Wire 2010
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Vistec EBPG5200 is set to generate structures to less than 8nm on varying substrates sizes from piece parts of a few millimetres to full patterning across a 200mm diameter.
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The Vistec EBPG5200 is the latest version of the highly successive and field-proven EBPG electron-beam lithography tool series.
Nano Tech Wire 2010
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Tool order: Vistec ships e-beam lithography system to Helmholtz-Zentrum Berlin E-beam lithography tool manufacturer Vistec Lithography, Inc. has received a major order from Helmholtz-Zentrum Berlin in Berlin-Adlershof for one of its Vistec EBPG5000plus electron-beam lithography systems.
Fabtech - News 2009
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Tool order: Vistec ships e-beam lithography system to Helmholtz-Zentrum Berlin E-beam lithography tool manufacturer Vistec Lithography, Inc. has received a major order from Helmholtz-Zentrum Berlin in Berlin-Adlershof for one of its Vistec EBPG5000plus electron-beam lithography systems.
Fabtech - News 2009
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