Definitions
from Wiktionary, Creative Commons Attribution/Share-Alike License.
- noun Plural form of
epilayer .
Etymologies
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Examples
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Material uniformity of thick, nearly lattice-matched AlInN epilayers grown on GaN-onsapphire templates can be assessed by energy dispersive X-ray analysis.
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For the sake of comparison, AlInN/AlN/GaN HEMTs were fabricated in a similar manner using epilayers grown on high-resistivity silicon (111) substrates.
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Incidentally, similar AlInN/GaN HEMT epilayers are commercially available from EPFL start-up NovaGaN.
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At EPFL in Lausanne, Switzerland, AlInN/GaN epilayers are grown in an Aixtron 200/4 RF-S MOCVD system on 2-inch substrates made from c-plane sapphire, silicon, and SiC.
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Dislocation densities in the epilayers are governed by the substrate choice, and range from 7 x 108 cm-2 for sapphire to 5 x 109 cm-2 for silicon.
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GaN epilayers grown on large-diameter Si wafers, potentially measuring up to 200mm, offer a lower-cost technology compared to other substrates.
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GaN epilayers grown on large-diameter Si wafers, potentially measuring up to 200mm, offer a lower-cost technology compared to other substrates.
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GaN epilayers grown on large-diameter Si wafers, potentially measuring up to 200mm, offer a lower-cost technology compared to other substrates.
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Photoluminescence is a well-established, non-contact, nondestructive technique used in the development and process control of semiconductors, with room temperature PL wafer maps giving vital information on the uniformity of alloy composition, material quality and defects in substrates, epilayers and device structures.
unknown title 2009
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GaN epilayers grown on large-diameter Si wafers, potentially measuring up to 200mm, offer a lower-cost technology compared to other substrates.
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