from Wiktionary, Creative Commons Attribution/Share-Alike License
- adj. In a photolithographic way.
Sorry, no etymologies found.
For the most accurate and fine-featured applications and the mass production of micro shims, Tecan uses Photo Electro Forming (PEF) - where the parts are grown electrochemically into a photolithographically-defined resist mould.
For low-cost tooling and rapid prototyping of burr and stress-free parts in a range of metals up to 1. 5mm thick, Tecan uses Photo Chemical Machining (PCM) - where the parts are produced by selectively removing metal by chemical etching through a photolithographically-defined resist layer.
MEMS structures are photolithographically patterned in alternating layers of deposited polysilicon and silicon dioxide, and then are "released" by dissolving away the silicon dioxide layers.