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- n. The design and use of scatterometers
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Unlike competing techniques such as scatterometry and x-ray, Rudolph's PULSE ™ Technology offers the capability for all of the above copper processes in a single tool.
"With scatterometry you do not need an image, you simply scatter light," explains Kandel.
The researchers realised a whole new approach was needed and decided to experiment with scatterometry, a new technique which is already in use for other types of measurement in chip-manufacturing facilities.
The polar excluded zone is a consequence of the side-looking nature of the instrument; these zones will be filled by both scatterometry (in which the instrument views the moon straight downward at low resolution) and high-angle SAR, in which operators roll the spacecraft 9 to 12 degrees to look at areas closer to the ground track.
When combined with the NanoCD Suite, Nanometrics systems have the broadest scatterometry metrology solution for today's semiconductor factories.
- dimensional metrology on structured surfaces using scatterometry and related methods