Definitions

from Wiktionary, Creative Commons Attribution/Share-Alike License

  • n. The design and use of scatterometers

Etymologies

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Examples

  • Unlike competing techniques such as scatterometry and x-ray, Rudolph's PULSE ™ Technology offers the capability for all of the above copper processes in a single tool.

    The Earth Times Online Newspaper

  • "With scatterometry you do not need an image, you simply scatter light," explains Kandel.

    PhysOrg.com - latest science and technology news stories

  • The researchers realised a whole new approach was needed and decided to experiment with scatterometry, a new technique which is already in use for other types of measurement in chip-manufacturing facilities.

    PhysOrg.com - latest science and technology news stories

  • The polar excluded zone is a consequence of the side-looking nature of the instrument; these zones will be filled by both scatterometry (in which the instrument views the moon straight downward at low resolution) and high-angle SAR, in which operators roll the spacecraft 9 to 12 degrees to look at areas closer to the ground track.

    Universe Today

  • When combined with the NanoCD Suite, Nanometrics systems have the broadest scatterometry metrology solution for today's semiconductor factories.

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  • - dimensional metrology on structured surfaces using scatterometry and related methods

    Veranstaltungen - idw - Informationsdienst Wissenschaft

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