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In their experiment, the researchers stretched a graphene membrane over a tiny aperture of silicon-nitride mounted on a silicon frame.
In their experiment, the Caltech scientists used microfabrication techniques to create a very tiny nanoelectromechanical system (NEMS) resonator, a silicon-nitride beam-just 2 micrometers long, 0.2 micrometers wide, and weighing 40 billionths of a milligram-that can resonate, or flex back and forth, at a high frequency when a voltage is applied.