Definitions
from Wiktionary, Creative Commons Attribution/Share-Alike License.
- noun inorganic chemistry The gas SiH2Cl2 that is used to grow
silicon nitride crystals forsemiconductors
Etymologies
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Examples
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= SiH 4 + 2HSiCl 3 2HSiCl 3 = H 2 SiCl 2 + SiCl 4 The silane is then distilled and the unreacted dichlorosilane is recycled back into the second redistribution step and the tetrachlorosilane is recycled back into the fluidized bed.
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Unreacted tetrachlorosilane and trichlorosilane (and dichlorosilane) are distilled
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The dichlorosilane then enters the next redistribution step where it reacts.
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