- From hexa- + methyl (Wiktionary)
“Some 2,500 contained trimethyl chloro silicane, a colourless, flammable liquid with a pungent smell, and another 500 contained hexamethyl disilazane, another colourless but smelly liquid.”
“In this case, the "snow" is ionized hexamethyl disiloxane, a liquid precursor to Si-DLC that gasifies in the plasma chamber and ultimately packs neatly into the molds on the IBM wafer.”
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