Definitions
from Wiktionary, Creative Commons Attribution/Share-Alike License.
- noun Any of several techniques for the production of
micro scale devices; especially the production ofsemiconductor devices using beams ofphotons orelectrons
Etymologies
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Examples
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But there was a serious hiccup with a key process called microlithography, whereby a beam of light traces out circuit patterns onto wafers of silicon.
WAFER WAR 2007
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But there was a hiccup with a key process called microlithography, whereby a beam of light traces out circuit patterns onto wafers of silicon.
CHIP DIP IN WATER? 2007
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The new chip, which is made of gallium arsenide, should be easily scaled and mass-produced, because it's made using microlithography -- the same process that makes microchips.
Spin Doctors Create Quantum Chip John Hudson 2006
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These enhancements are particularly useful for evaluating the performance of optical designs with stringent accuracy requirements, such as microlithography lenses, laser scanning systems and optical telecommunication devices.
unknown title 2011
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As the inventor of ARC® anti-reflective coating products for the microlithography world, Brewer Science continues to expand its scope with CNTRENE® microelectronics-grade carbon nanotube solutions, ProTEK® temporary etch protective coatings,
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Cutting-edge innovations designed to address a host of critical lithography challenges are outlined in a variety of technical areas, including advanced photoresist materials, mask blanks and process technologies for extreme ultraviolet ( "EUV") lithography; double-patterning techniques for optical microlithography; lithographic techniques for self-assembly; and advances in electron-beam ( "e-beam") lithography, nanometrology, and nanoimprint technologies, among others.
Nano Tech Wire 2010
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Cutting-edge innovations designed to address a host of critical lithography challenges are outlined in a variety of technical areas, including advanced photoresist materials, mask blanks and process technologies for extreme ultraviolet ( "EUV") lithography; double-patterning techniques for optical microlithography; lithographic techniques for self-assembly; and advances in electron-beam ( "e-beam") lithography, nanometrology, and nanoimprint technologies, among others.
Nano Tech Wire 2010
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Our extensive product portfolio includes ARC (R) anti-reflective coatings for microlithography, ProTEK (R) temporary etch protective coatings,
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